OPTICAL: Particle Inspection Equipment.
Publication Date: 01-FEB-04
Publication Title: NDT Update
Format: Online
Company: ADE Corp.

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Description

ADE Corp. announced that it has recently received significant multiple orders for AWIS Advanced Wafer Inspection Systems with deliveries scheduled over the next several months. These 200- and 300-mm systems will be used by silicon wafer manufacturers for surface defect inspection and particle detection, and will be installed in manufacturing sites worldwide. The...



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