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ADE Receives Multiple System Order for Wafer Inspection Tools For Semiconductor DRAM Production.

Publication: Business Wire
Publication Date: 15-JUN-04
Format: Online
Delivery: Immediate Online Access

Article Excerpt
Business Editors

SEMICON West 2004

WESTWOOD, Mass.--(BUSINESS WIRE)--June 15, 2004

Film Inspection Tool(TM) Systems to Support New 300mm Production Line at Major Korean DRAM Supplier

ADE Corporation (NASDAQ: ADEX), a leading supplier of wafer inspection and measurement systems, announced today that it has received a multiple system order for its Film Inspection Tool from a leading Korean DRAM manufacturer. Delivery of these systems, which will support the manufacturer's 300mm DRAM production, will be completed by the second quarter of ADE's FY 2005.

ADE's Film Inspection Tool is a high-speed, fully automatic surface inspection and micro-defect classification system for unpatterned semiconductor...

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