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...with these gases include fire, explosion, and contamination resulting in product loss or unscheduled preventative maintenance. These gases must be continuously monitored to ensure the health and safety of employees, to protect property, and to maintain regulatory compliance.
Continuous gas monitoring in semiconductor facilities is requirement of local and state regulations, which are typically based on information from the Occupational Health & Safety Administration (OSHA), the Code of Federal Regulations, FM Approvals, the NFPA Fire Protection standards, the Uniform Building Code and the Uniform Fire Code. These regulations and standards offer guidelines concerning the proper design, installation and operation of hazardous gas detection systems.
Reliable gas detection and monitoring systems are an essential element of a semiconductor plant's safety system. A variety of systems are available for different monitoring applications, and using the correct system will result in managing gas hazards in the most effective and efficient way possible.
Hazardous...
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