Publication: NDT Update
Publication Date: 01-JAN-04
Delivery: Immediate Online Access
Author:
Article Excerpt
KLA-Tencor announced it has added new defect detection, analysis, and process monitoring capabilities to its industry-leading Surfscan SP1 series of defect detection tools. A new suite of software options, called Monitor eXpert (MX 4.0), enables the Surfscan SP1 tools to provide both process monitoring information and benchmark defect detection in a single scan with no additional overheadgiving wafer and IC manufacturers a fast and cost- effective alternative to many time-consuming and manual process- monitoring steps. Widely considered the benchmark tool for bare wafer defect detection, KLA-Tencors Surfscan SP1 systems can be found in every process module at leading wafer and IC manufacturing fabs worldwide.
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