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Axcelis Receives Multiple System Follow-on Order for Optima MD Single Wafer Ion Implantation System; Innovative New Implant Platform to Cover All Application Needs for Leading Edge Devices.

Publication: Business Wire
Publication Date: 09-MAY-06
Format: Online
Delivery: Immediate Online Access

Article Excerpt
BEVERLY, Mass. -- Axcelis Technologies, Inc. (NASDAQ: ACLS) today announced that it has received a multiple system order for its innovative Optima MD mid dose single wafer implant technology from a leading logic chipmaker.

Axcelis' new system gives customers the flexibility to cover the widest array of implant application needs -- from 500eV all the way to 750keV -- with a single tool. The tool...

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