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Exitech Ltd. Purchases Gemini Express Vacuum Handling Systems from Brooks-PRI Automation; Maker of extreme-UV (EUV) lithography systems for use in advanced lithography R&D outsources its automation to Brooks-PRI.

Publication: PR Newswire
Publication Date: 07-FEB-03 		Format: Online
Delivery: Immediate Online Access

Article Excerpt
Brooks-PRI Automation, Inc. , which delivers manufacturing automation solutions for the semiconductor, precision electronics and other industries, today announced that Exitech Ltd., a leading developer of photon- based tools for emerging industrial micro fabrication tasks, has purchased two Brooks-PRI Gemini Express 5000 (GX5000) vacuum handling systems, including supervisory level software for controlling the systems. Exitech will integrate the GX5000 tools with its leading edge EUV lithography system and with a track system from a major capital equipment supplier. International SEMATECH and a leading U.S. chip manufacturer will use the integrated EUV systems for their advanced lithography research and development programs.

"We are pleased that Exitech has chosen Brooks-PRI as their automation partner for this new enabling...

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