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Advanced Energy Unveils New Multi-Gas, Multi-Range Digital MFCs That Reduce Spares Inventories, Tool Downtime and CoO; Aera(R) Transformer(TM) MFCs Offer New Levels of Process Flexibility for all Plasma Process Environments in Today's Advanced Fabs.

Publication: PR Newswire
Publication Date: 08-APR-04 		Format: Online
Delivery: Immediate Online Access

Article Excerpt
Advanced Energy Industries, Inc. today announced its new Aera(R)Transformer(TM) family of digital multi-gas, multi-range mass flow controllers (MGMR MFCs). These advanced, high-precision products provide original equipment manufacturers (OEMs) and end users with optimal MFC flexibility and process efficiency for their semiconductor and industrial vacuum applications.

(Logo: http://www.newscom.com/cgi-bin/prnh/20030825/AEISLOGO)

Building on the successful, field-proven Aera(R) FC-D980 MFC technology, the new Transformer products enable customers to dramatically reduce their spares inventories. This reduced inventory can create a substantially lower total cost of ownership (CoO) --...

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