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FSI INTERNATIONAL UNVEILS THIRD GENERATION OZONE PROCESS.

Publication: Industrial Environment
Publication Date: 01-OCT-01
Format: Online - approximately 353 words
Delivery: Immediate Online Access

Article Excerpt
FSI International (Nasdaq:FSII), Minneapolis, has introduced its new third generation ozone process for front-end-of-line (FEOL) resist strip and post-ash clean. This new offering marks a groundbreaking advance in ozone processing through the pairing of generous economic benefits with environmentally friendly initiatives at a low cost of ownership (COO). Developed for use in...

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