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OPTICAL: Flatness Metrology Tool Debuts.

Publication: NDT Update
Publication Date: 01-MAY-03
Format: Online - approximately 376 words
Delivery: Immediate Online Access

Article Excerpt
ADE Corp. announced the first sale of its advanced optical flatness metrology tool, WaferSight, to a leading-edge silicon wafer manufacturer. The tool, based on ADE's proprietary interferometry technology, was purchased after an extensive beta evaluation period and will now be brought on-line...

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...in the wafer manufacturer's most advanced 300-mm factory. This is the first optical...

NOTE: All illustrations and photos have been removed from this article.



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