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Article Excerpt
Integrated Sensing Systems, Inc. (ISSYS, Yypsilanti, MI, 734-547-9896)(www.mems-issys.com) is spearheading the development and commercialization of more convenient, MEMS-based microfluidic sensing systems that can streamline, and enhance the cost-effectiveness of, chemical analysis, quality control, and critical research in such industries as pharmaceutical, petroleum, food & beverage, and medical.
ISSYS' innovative, proprietary techniques for the design and fabrication of stationary and free-standing silicon-based micro-tubes (U.S. patent #6,477,901) have key potential for providing an enhanced technology tool facilitating the integration of MEMS (microelectromechanical systems) devices into streamlined and more accurate industrial and scientific instruments and medical device products, including micro-density meters, chemical composition analyzers, micro-flow sensors, and portable multiple-drug delivery systems.
In addition, ISSYS has developed a novel method of chip-level gettering to achieve the sub-milliTorr pressures required for the microfuidic sensor to exhibit adequate resonator signal quality. The "NanoGetter," which is comprised of nanometer-thick film layers, effectively absorbs the trapped and desorbed gases that can remain in the fluidic sensor's micro-cavity during MEMS processing and vacuum packaging.
To capitalize on their gettering technology used to produce the micro-tube, ISSYS is in the process of creating a separate company, NanoGetter, which will supply the new gettering technology for such applications as MEMS vacuum packaging, solid-state vacuum pumps, and gas purification.
Douglas Sparks, executive vice president-operations at ISSYS, noted that target markets for the NanoGetter technology include manufacturers of RF (radio frequency) MEMS devices, MEMS gyros, and MEMS pressure sensors. Moreover, ISSYS will license Nanogetter technology for such applications as gas purification and vacuum chamber pumping in such markets as the semiconductor industry and analytical equipment.
ISSYS'...
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