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Ade Announces Initial Sale of Its WaferSight Wafer Geometry Tool for 90nm and Below; ADE Wafer Flatness Tool Supports Semiconductor Industry Roadmap to 35nm Generation.

Publication: Business Wire
Publication Date: 31-MAR-03 		Format: Online
Delivery: Immediate Online Access

Article Excerpt
Business Editors/Health/Medical Writers

SEMICON Europa 2003

WESTWOOD, Mass.--(BUSINESS WIRE)--March 31, 2003

ADE Corporation (Nasdaq: ADEX), a leading supplier of production metrology and inspection systems for the semiconductor wafer, semiconductor device, magnetic storage and optics manufacturing industries, today announced the first sale of its advanced optical flatness metrology tool, WaferSight(TM), to a leading-edge silicon wafer manufacturer. The tool, based on ADE's proprietary interferometry technology, was purchased after an extensive beta evaluation period and will now be brought on-line in the wafer manufacturer's most advanced 300mm factory. This is the first optical interferometric flatness system bought for full-scale 300mm wafer production....

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