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Advanced In-Fab Defect Analysis.

Publication: NDT Update
Publication Date: 01-AUG-02
Format: Online
Delivery: Immediate Online Access

Article Excerpt
FEI Co. released its Defect Analyzer DualBeam systems for advanced in-fab defect analysis of today's new processes for 130 nm nodes and below. It is engineered to reduce new process ramp times and lower the financial impact of yield-killing excursions and is available as a 200-mm wafer tool...

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