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Optical Digital Profiometry.

Publication: NDT Update
Publication Date: 01-DEC-03
Format: Online - approximately 441 words
Delivery: Immediate Online Access

Article Excerpt
Timbre Technologies announced that Agere Systems has implemented Optical Digital Profilometry (ODP) technology provided by Timbre Technologies. Agere is using ODP for process control in several critical applications, including logic gate, shallow trench isolation and aluminum interconnect in both the lithography and etch modules.

Adopting ODP has enabled Agere to achieve accurate critical dimension (CD) measurements, digital cross-section profiles and other metrology results not available...



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