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NEW TECHNOLOGY: X-ray Inspection Meets Chip-Making.

Publication: NDT Update
Publication Date: 01-DEC-03
Format: Online - approximately 334 words
Delivery: Immediate Online Access

Article Excerpt
A decades-old, x-raybased method for studying the atomic structure of materials may be the answer to a looming semiconductor industry needa rugged, high-throughput technology for measuring dimensions of chip circuitry packed with devices approaching molecular proportions.

A team led by of...

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...National Institute Standards and Technology (NIST) scientists recently...

NOTE: All illustrations and photos have been removed from this article.



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