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New findings from G. Benstetter and co-authors describe advances in thin solid films.

Publication: Electronics Newsweekly
Publication Date: 29-JUL-09
Format: Online
Delivery: Immediate Online Access

Article Excerpt
"This paper gives an overview of established methods and new developments in the field of Scanning Probe Microscopy (SPM) of functional films and semiconductor devices," researchers in Deggendorf, Germany report.

"It focuses on both, SPM analyses of passive structures and devices in operation. The contribution includes techniques such as...

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